AN INTEGRATED SURFACE MICROMACHINED CAPACITIVE LATERAL ACCELEROMETER WITH 2μG/√Hz RESOLUTION
نویسندگان
چکیده
A capacitive position measurement interface minimizes noise from parasitics in the electromechanical interface and uses correlated double sampling to achieve better than 10Å/√Hz displacement resolution. This translates into 2μG/√Hz acceleration resolution when the device is operated in a vacuum.
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تاریخ انتشار 2002